The CURTIS Laser Repair System is designed to remove dust or residue photoresist and to cut the short defects by laser ablation. The CURTIS has 532 nm wavelength laser to achieve optimum results in the removal of aluminum, molybdenum, and tantalum on panels before or after process. The tool has X, Y moving stage for the substrate moving and Z axis moving to focus the laser source on the defects on the substrate. It is applicable up to Gen-II (370 x 470 mm) size samples.
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