CURTIS Laser Repair

Location
MTW – Macro Technology Works, Room 2208
Description

The CURTIS Laser Repair System is designed to remove dust or residue photoresist and to cut the short defects by laser ablation. The CURTIS has 532 nm wavelength laser to achieve optimum results in the removal of aluminum, molybdenum, and tantalum on panels before or after process. The tool has X, Y moving stage for the substrate moving and Z axis moving to focus the laser source on the defects on the substrate. It is applicable up to Gen-II (370 x 470 mm) size samples.

Techniques
  • Metrology
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $25/hour $30/hour  
We welcome industry customers! Contact us to find out our current rates.
Photos
The CURTIS Laser Repair System on the left with controlling computer on the right.