Description
The EIT is a single panel asher used to remove photoresist from wafers. Once a recipe is chosen, one panel at a time from the send cassette is loaded automatically by Staubli robot into the reaction chamber. The send cassette can hold up to 20 panels per cassette from slots 1-20. When ashing is complete, the panel is unloaded first to an alignment station and then placed into the receive cassette.
Techniques
- Ashing
- Photoresist removal
Documents and manuals
- File
ASU Unit
Knowledge Enterprise
Rates
Service | ASU rate | Nonprofit/other academic rate | Notes |
---|---|---|---|
Equipment use | $50/hour | $60/hour |
We welcome industry customers! Contact us to find out our current rates.
Photos