EIT

Description

The EIT is a single panel asher used to remove photoresist from wafers. Once a recipe is chosen, one panel at a time from the send cassette is loaded automatically by Staubli robot into the reaction chamber. The send cassette can hold up to 20 panels per cassette from slots 1-20. When ashing is complete, the panel is unloaded first to an alignment station and then placed into the receive cassette.
 

Techniques
  • Ashing
  • Photoresist removal
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU rate Nonprofit/other academic rate Notes
Equipment use $50/hour $60/hour  
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