The JEOL 6300F is a Field Emission Scanning Electron Microscope (FESEM) designed to observe small structures as thin as 5 nm. The FESEM utilizes electrons instead of visible light to “observe” these small structures. The electrons are generated by a field emission cathode in an electron gun which produces a narrow, high energy electron beam which is scanned across a sample. The shorter wavelength of electrons compared to visual light allows for a much higher magnification than could ever be possible with a conventional microscope. The JEOL 6300F can hold up to a 150 mm wafer. The FESEM can provide up to 350,000 times magnification and is also fitted with an energy dispersive x-ray analysis tool to identify elemental materials.
- Field emission scanning electron microscopy
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