Description
The FormFactor Tesla CM300 probe station can provide unattended testing on small pads over time and at multiple temperatures. This instrument is capable of high-volume testing on up to 300mm diameter wafers. Measurements for I-V/C-V, RTN, and RF are possible with this probe station.
Chuck thermal range of -60°C to +300°C and DC, AC, and RF device characterization. Manual or automated probe positioning and alignment is possible.
Techniques
- Probe station for electrical characterization of integrated circuit devices
- Titration
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment Use | $36/hour | $55/hour |
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