Semiconductor Device Processing

Advanced Electronics and Packaging

Laurell WS400B Spin Coater

Description

The Laurell Spin Coater is a coating system used to spin coat layer of spin-coat able material, thicknesses range can range from 2.5um to 20um depending on the coating material.

A spread step and spin step is programmed in the controller along with a specific time at each step.

Techniques

  • Spin coating

Documents and manuals

Rates

Service or materialASU rateNonprofit or academic rateNotes
Equipment use$59/hour$77/hour

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