Semiconductor Device Processing

Advanced Electronics and Packaging

Yamato DP43 Vacuum Bake Oven

Description

The Yamato Vacuum Bake Oven is an oven which is used for baking/curing under vacuum pressure of around -0.1mPa at elevated temperature of up to 250 C.

Depending on the user, this oven can run in either manual mode or program mode. This oven’s capacity of four shelves can accommodate up to a 16”x16” part. The oven chamber overall size is 17”x17”x17”.

Techniques

  • Vacuum pressure curing and baking

Documents and manuals

Rates

Service or materialASU rateNonprofit or academic rateNotes
Equipment use$59/hour$77/hour

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