Description
The CEE Spin Coaters #1 and #2 are photoresist spinners. Spin Coater #1 has a programmable Precision Hot Plate Bake. Spin Coater #2 is stand-alone spinner. The Brewer Science CEE 200CBX precision coat-bake system combines a track-quality precision spin coater with a high-uniformity bake plate. CEE 200CBX programs are easily entered, monitored and stored through a Windows®-based PC graphical user interface (GUI). These spin coaters apply coatings to substrates up to 200mm round or 7 in. square and spin at speeds up to 6000 rpm. All coatings are hand dispensed using pipettes.
Learn more about lithography deposition technique and associated tools.
Techniques
- Lithography
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $52.50/hr | Contact Nanofab for external rates. |
