Description
The CHA tool is an electron beam evaporation system utilizing a four pocket hearth for multi-layer film deposition. The tool is used to deposit aluminum (Al), nickel (Ni), platinum (Pt), and titanium (Ti) using a triple dome planetary.
Learn more about thin film deposition technique and associated tools.
Techniques
- Thin film deposition
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $52.50/hr | Contact Nanofab for external rates. |
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