Semiconductor Device Processing

NanoFab

Filmetrics F20 and F40

Description

The Filmetrics F20 and F40 are both optical reflectometers used to measure the thickness of transparent thin films. The F20 is a general purpose film thickness measurement system. The F40 is attached to a microscope that allows film thickness measurement using very small spot sizes.

This tool requires pre-requisite training on other techniques: clean room safety and wet bench training.

Specs:
Thickness Range:
F20 15 nm to 70 μm.
F40 20 nm to 40 μm.
Wavelength Range:
F20 380 nm to 1050 nm.
F40 400 nm to 850 nm.

Learn more about characterization technique and associated tools, such as optical reflectometry.

Techniques

  • Optical reflectometry

Documents and manuals

Rates

Service or materialASU rateNonprofit or academic rateNotes
Equipment use$52.50/hrContact Nanofab for external rates.

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