Description
The Lesker #2 tool is a dedicated zinc oxide (ZnO) sputter deposition tool. The tool has single ZnO target powered by an RF power supply.
Learn more about thin film deposition technique and associated tools.
Techniques
- Thin film deposition
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $52.50/hr | Contact Nanofab for external rates. |
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