Description
The Specialty Coating Systems Spin Coater Series is a programmable coater for the uniform application of photoresists, polyimides, silica films and most organic solutions to planar substrates. Chucks are available for small pieces up to 6” wafers.
Learn more about lithography deposition technique and associated tools.
Techniques
- Lithography
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $52.50/hr | Contact Nanofab for external rates. |
Image Gallery
