Description
The Zygo ZeGage is a 3D optical surface profiler. It provides non-contact measurement and characterization of surface features. Samples measured must be both reflective and opaque.
This tool requires pre-requisite training on other techniques: clean room safety and wet bench training.
Specs:
NA: 0.14
Working Distance: 21 mm
Optical Resolution: 2.04 μm
Field of View: 1.74 mm x 1.74 mm. Capable of field stitching.
Spatial Sampling: 1.74 μm/pixel
Techniques
- Characterization
- 3D optical profiling
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $52.50/hr | Contact Nanofab for external rates. |
