Semiconductor Device Processing

Solar Fab

01. Alessi probe station

Description

The Alessi probe station at the Solar Fab is configured to perform dark and illuminated steady-state current-voltage measurements (I-V measurements). Presently, the equipment accommodates up to 150 mm round wafers for dark I-V and 1 cm2 for light I-V. It is equipped with a vacuum line for wafer stability during measurement and has x-y sliders for measuring different spots on the wafer.

Techniques

  • Dark I-V testing and characterization

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