Semiconductor Device Processing

Solar Fab

06. MRC 944 (Zolushka)

Description

4 target DC sputter tool for conductive targets. Currently installed are targets for 90/10 ITO, 90/10 IZO, Al, and Ag. Not currently installed but appropriate for the 944 is Ni.

Techniques

  • Thin film sputtering

Didn't find what you are looking for?

Looking for a specific technique or piece of equipment? Search equipment across all of our facilities.

Ready to start a project?

Learn how to access our facilities, training, equipment and services.