Semiconductor Device Processing

Solar Fab

16. Muffle furnace 5

Description

The Solar Fab presently has two Fischer Scientific forced draft muffle furnaces with PID microprocessor control for operating temperatures up to 1125 °C. The furnace chambers are molded from alumina silicate ceramic fibers for low thermal mass and to provide a low exterior surface temperature. Heating is accomplished by electric resistance elements embedded in the bottom and side walls. Temperature uniformity is aided by a blower/heater which serves to pre-heat ambient air before it enters the chamber. Customized heating programs consisting of up to 24 heating/cooling ramps can be created.

Techniques

  • Annealing
  • Paste curing and drying

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