Semiconductor Device Processing

Solar Fab

17. nTact nRad slot-die coater

Description

The nRad Custom System is a versatile slot-die coating platform that can handle perovskite inks as its process fluid and accommodate substrate sizes up to M2 and G1. Various masking shims can be utilized to precisely define the area of deposition, while a syringe pump ensures controlled ink delivery. The system’s target dry film thickness ranges from 50 to 1,000 nm, and a Dry Air Kit is included to facilitate the drying process.

Techniques

  • Substrate coating

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