Semiconductor Device Processing

Solar Fab

08. Sierra Therm Belt Furnace

Description

The belt furnace currently used at the Solar Fab is Sierratherm’s model 7k8-70C96-8LIR, an eight zone belt furnace modified to run a standard BTU controller for hardware and programming simplicity. Heating is accomplished by a plurality of tubular quartz IR lamps, and the maximum furnace temperature is 950 °C. The belt furnace accommodates up to 9 inch substrates and has a maximum belt speed of 240 inches/min. Cooling is accomplished by water cooled, open air cooled, and fan cooled sections.

Techniques

  • Annealing
  • Paste firing

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