Semiconductor Device Processing

Solar Fab

40. Temescal FC-1800

Description

The FC-1800 is a standard e-beam evaporator equipped with a custom planetary to directly accommodate up to three 156 mm solar substrates or smaller sizes, including pieces. A four-pocket turret is present, and existing processes have been defined for Ti, Pt, Ag, and Al evaporation.

Techniques

  • e-beam evaporation

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