40. Temescal FC-1800

Description

The FC-1800 is a standard e-beam evaporator equipped with a custom planetary to directly accommodate up to three 156 mm solar substrates or smaller sizes, including pieces. A four-pocket turret is present, and existing processes have been defined for Ti, Pt, Ag, and Al evaporation.

Location: MTW - MacroTechnology Works, cleanroom 2214

Techniques
  • e-beam evaporation
ASU Unit
Knowledge Enterprise
Photos
Temescal FC-1800