Description
Optical profilometry uses white light interferometry to generate a 3D image of the sample surface with a height resolution better than 1Å.
Uses
- Film thickness from an edge
- Transparent film thickness in the 1 to 50 μm range with no edge/step
- Volume of etch pits / hole
- Roughness
- Radius of curvature
Useful gauges
- Non-contact
- 8″ square area (typically only measure ~ 1×1″ at the very most)
- 9 computer-controlled magnifications using 3 objectives (5x, 20x, 50x)
- Maximum vertical range ~7 mm using 5X
- Maximum sample height: 180 mm
- Full 3D map
- Lateral resolution up to ~0.3 μm
Contact
Anthony Woolson
Research Specialist
[email protected]
480-727-2670
Emmanuel Soignard
Operations Director
[email protected]
480.965.7242
Techniques
- Surface imaging
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $31.00/hr | $65.00/hr | |
| Equipment use with staff assistance | $91.00/hr | $161.00/hr |
