Description
Specifications
- Thermal emission SEM with tetrode dual-anode source emission geometry
- accelerating voltage: 200V to 30kV
- beam current up to 2µA continuously adjustable
- Magnification 5 to 1,000,000x
- high vacuum imaging (< 6.10-4 Pa)
- 3.0nm at 30kV (SE)
- 8.0 nm at 3kV(SE)
- low-vacuum imaging (up to 130Pa)
- 3.0nm at 30kV (SE)
- 10nm at 3 kV (SE)
- ESEM (up to 2600Pa)
- 3 nm at 30kV (SE)
Detectors
- Secondary electron
- Back Scattered Electron
- Energy dispersive X-ray detector
Contact
Sisouk Phrasavath
Engineer Principal
sisouk.phrasavath@asu.edu
480.965.9153
Techniques
- SEM
- ESEM
- EDS
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU rate | Nonprofit/other academic rate | Notes |
|---|---|---|---|