Semiconductor Device Processing

Solar Fab

28. Acid hood 2 (BOE)

Description

This is one of the hoods in the Solar Fab specifically designated to a defined chemistry. In this case, there are two tanks for HF work, one for routine processing and a second one for SHJ fabrication in which surface cleanliness is paramount. As is the case for most of the hoods, features include a cascade rinse tank, process timers, a vegetable sprayer, and an N2 blowoff gun.

Techniques

  • Wet chemical processing

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