Semiconductor Device Processing

Solar Fab

Solar Fab equipment and rates

The Solar Fab employs an access-based fee system for working in the lab.  Currently, there are effectively three modes for working in the lab. These are as follows:

  • ASU internal use: ASU students, postdocs and PIs process their own material.
  • Contracted work: Solar Fab personnel perform processing for external entities.
  • Visiting third parties: Whether temporary or stationed at MTW, visitors perform their own processing after appropriate safety and tool training, 

Irrespective of mode, access is open to all capabilities including texturing, cleaning, furnace runs, plasma enhanced chemical vapor deposition, metallization, screen printing, rapid thermal annealing, MOCVD, ALD, metrology and characterization.

Rates

For visiting third parties, there is a monthly charge for each month in which access to the lab is made and this is coupled with a daily charge levied for each day within the month in which access to the lab is made. The daily charge is capped after ten entries for a given month.

ASU internal rateCore-assisted workVisiting third parties
Tiered structure, no monthly feeMonthly fee/daily charge
Cleanroom labs – $205/day$472/stepFor industry and preferred membership (startup, SBIR, nonprofit or annual spend >$20K) rates, contact us.
1315 Suite – $126/day
Characterization – $63/day
Daily cap at $236/day; overall cap at $2,100/month

Equipment

01. Alessi probe station

02. BT Imaging LIS-R3 (Allen B)

03. KLA Zeta-300 optical profiler

04. KOH hood

05. Etch SRD 3

06. MRC 944 (Zolushka)

07. MRC 943 (Batwings)

08. Sierra Therm Belt Furnace

09. Analytical balance

10. Four Point Probe

11. Zeiss Axiotron microscope

13. NanoSpec/AFT

14. Sinton FCT-450

14A. Sinton FCT-650

15. Muffle furnace 4

16. Muffle furnace 5

17. nTact nRad slot-die coater

18. APS GF-12 reflow oven

19. Steag-AST RTA

20. PV Measurements QEX10

21. AMAT P-5000

22. Screen printer 1 (AMI)

23. Screen printer 2 (MPM)

24. Screen printer 3 (Baccini)

25. MRL furnace

27. Acid/solvent hood

28. Acid hood 1 (RCA-A and -B)

29. Acid hood 2 (BOE)

30. SRD 5

31. Dual stack SRD (SRD 7)

32. Piranha hood

33. Sinton lifetime tester

34. EL/PL

36. Soitec GaAs hood

37. Etch SRD 1

38. Acid hood 5

39. Solvent hood

40. Temescal FC-1800

41. Leitz Ergolux

43. ERE #1

44. Newport SS I-V tester

45. Electrox EMS 100 laser

46. NPC laminator

46A. Panasonic R&D Inkjet Printer

47. Technic Ni LiP

48. Technic Cu LiP

49. Technic Sn LiP

50. Plating hood 2

51. Solvent hood

52. Plating hood 1

53. Kintai JTS-331 ECA dispenser

54. BrightSpot ContactSpot

55. Soldering station

56. Frigidaire refrigerator

57. Octopus PECVD

58. Octopus acid hood

59. Semitool SRD

60. Veeco Savannah Atomic Layer Deposition

61. Veeco Fiji – Plasma Enhanced ALD for R&D

62. Cobalt Fusion laser

63. Universal Laser Systems 2001

65. Thermo Sensorik ThermoSpector

66. Hitachi U-4100

67. CSZ environmental chamber #1

68. Cole-Parmer oven

69. CSZ environmental chamber #2

70. San-EI Electric XHS-50S1-SA

71. San-Ei Electric XHS-220S1-SA

72. Sinton custom tester

73. Sinton FMT-500

74. Fluxim Litos

75. J.A. Woollam theta-SE Spectroscopic Ellipsometer

76. KLA-Tencor P-17 OF Profiler

77. Agnitron Agilis 100 MOCVD Reactor

78. Agnitron Agilis Mini MOCVD Reactor

Didn’t find what you are looking for?

Looking for a specific technique or piece of equipment? Search equipment across all of our facilities.

Ready to start a project?

Learn how to access our facilities, training, equipment and services.