Solar Fab equipment and rates

The Solar Fab employs an access-based fee system for working in the lab.  Currently, there are effectively three modes for working in the lab. These are as follows:

  • ASU internal use: ASU students, postdocs and PIs process their own material.
  • Contracted work: Solar Fab personnel perform processing for external entities.
  • Visiting third parties: Whether temporary or stationed at MTW, visitors perform their own processing after appropriate safety and tool training, 

Irrespective of mode, access is open to all capabilities including texturing, cleaning, furnace runs, plasma enhanced chemical vapor deposition, metallization, screen printing, rapid thermal annealing, MOCVD, ALD, metrology and characterization.

Rates

For visiting third parties, there is a monthly charge for each month in which access to the lab is made and this is coupled with a daily charge levied for each day within the month in which access to the lab is made. The daily charge is capped after ten entries for a given month.

ASU internal rateCore-assisted workVisiting third parties
Tiered structure, no monthly feeMonthly fee/daily charge
Cleanroom labs – $205/day$472/stepFor industry and preferred membership (startup, SBIR, nonprofit or annual spend >$20K) rates, contact us.
1315 Suite – $126/day
Characterization – $63/day
Daily cap at $236/day; overall cap at $2,100/month

Equipment

00. J.A. Woollam theta-SE Spectroscopic Ellipsometer

01. Alessi probe station

02. BT Imaging LIS-R3 (Allen B)

03. KLA Zeta-300 optical profiler

04. KOH hood

05. Etch SRD 3

06. MRC 944 (Zolushka)

07. MRC 943 (Batwings)

08. Sierra Therm Belt Furnace

09. Analytical balance

10. Four Point Probe

11. Zeiss Axiotron microscope

12. KLA-Tencor P-17 OF Profiler

13. NanoSpec/AFT

14. Sinton FCT-450

15. Muffle furnace 4

16. Muffle furnace 5

17. nTact nRad slot-die coater

18. APS GF-12 reflow oven

19. Steag-AST RTA

20. PV Measurements QEX10

21. AMAT P-5000

22. Screen printer 1 (AMI)

23. Screen printer 2 (MPM)

24. Screen printer 3 (Baccini)

25. MRL furnace

26. Acid/solvent hood

27. Acid hood 1 (RCA-A and -B)

28. Acid hood 2 (BOE)

29. SRD 5

30. Dual stack SRD (SRD 7)

31. Piranha hood

32. Sinton lifetime tester

33. EL/PL

35. Soitec GaAs hood

36. Etch SRD 1

37. Acid hood 5

38. Solvent hood

39. Leitz Ergolux

40. Temescal FC-1800

41. Veeco D-180

42. ERE #1

43. Newport SS I-V tester

44. Electrox EMS 100 laser

45. NPC laminator

46. Technic Ni LiP

47. Technic Cu LiP

48. Technic Sn LiP

49. Plating hood 2

50. Solvent hood

51. Plating hood 1

52. Kintai JTS-331 ECA dispenser

53. BrightSpot ContactSpot

54. Soldering station

55. Frigidaire refrigerator

56. Octopus PECVD

57. Octopus acid hood

58. Semitool SRD

59. Veeco Savannah Atomic Layer Deposition

60. Veeco Fiji – Plasma Enhanced ALD for R&D

61. Cobalt Fusion laser

62. Universal Laser Systems 2001

64. Fluxim Litos

65. Thermo Sensorik ThermoSpector

66. Hitachi U-4100

67. CSZ environmental chamber #1

68. Cole-Parmer oven

69. CSZ environmental chamber #2

70. San-EI Electric XHS-50S1-SA

71. San-Ei Electric XHS-220S1-SA

72. Sinton custom tester

73. Sinton FMT-500

Agnitron Agilis 100 MOCVD Reactor

Agnitron Agilis Mini MOCVD Reactor

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