Semiconductor Device Processing Solar Fab Equipment and Rates 30. Dual stack SRD (SRD 7)

30. Dual stack SRD (SRD 7)

Description

This is a stacked arrangement of two spin rinse dryers that is used for substrates smaller than 156 mm. Rotors can be changed out and are available for 3”, 4”, 125 mm solar, and 150 mm round substrates. This SRD supports substrates that were processed in the adjacent hoods (Acid/solvent hood, Acid hood 1, Acid hood 2, and the Piranha hood).

Techniques

  • Final substrate rinsing and drying after wet processing

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