Description
The Electrox EMS 100 is a Nd: YAG (1064 nm) laser in an exhausted enclosure coupled with a custom multi-axis stage that is used for silicon cutting.
Techniques
- Edge isolation
- Silicon cutting
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The Electrox EMS 100 is a Nd: YAG (1064 nm) laser in an exhausted enclosure coupled with a custom multi-axis stage that is used for silicon cutting.


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