Description
The four point probe at the Solar Fab is a Signatone S 302-8. The tool measures bulk resistivity (ohm-cm) and sheet resistivity (ohm/square) of wafers and diffusions. A custom LabVIEW program provides the user interface and drives the power supply. Accuracy and repeatability is greatly improved by a linear regression fit to a large range of bias voltages.
Techniques
- Bulk resistivity
- Sheet resistance
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