Description
The OAI Model 800 Mask Aligner is a semi-automated, four-camera, optical front- and backside mask Aligner. It delivers ultra-precise (1µm-2µm) alignment accuracy. This mask Aligner also features motorized backside focus, motorized auto leveling and auto gap setting.
Specs:
Size: 2″, 100mm, 150mm, 200mm, Pieces
Thickness: 0.1 – 10mm
Mask Size: 4″x4″; 5”x5”, 7”x7”, and 9”x9”
Alignment accuracy:
- Top side alignment: ± 1.0µm 3σ.
- Bottom side alignment: ± 1.25µm 3σ.
- Large gap alignment: Option / ± 1.5µm 3σ.
Resolution:
- Vacuum + Hard Contact ≤ 1 µm.
- Hard Contact ≤ 1.5 µm.
- Soft Contact ≤ 2.0 µm.
- Proximity ≥ 3.0 µm.
Exposure:
- Wave length: 350 – 450nm.
- Mercury arc lamp: 350 W.
Learn more about lithography deposition technique and associated tools.
Techniques
- Lithography
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $52.50/hr | Contact Nanofab for external rates. |
