Semiconductor Device Processing Nanofab Get Started

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ASU NanoFab is open to students and faculty from ASU and other institutions, as well as industry users. We welcome all students who want hands-on experience to spend time in the NanoFab and be trained on the appropriate tools.

External companies can benefit from using NanoFab as:

  • A foundry service where the processing is done by ASU staff
  • A prototyping facility where the process is developed by NanoFab staff or your own researchers

To begin a project with NanoFab, email [email protected]. A staff member will contact you and walk you or your advisor through the process.

Training and equipment is scheduled through iLab. 

Learn more about iLab and how to sign up.

Access, orientation and required training

Required training is provided through Workday Learning. Customers from outside of ASU will receive access after onboarding with Core Research Facilities staff. Contact [email protected] with any questions.

Required trainings include:

Cleanroom Safety class

Once you have initiated your project with the NanoFab staff and completed the Workday training, you need to:

  1. Print a copy of the Safety Handbook and read it (needed for the safety class).
  2. Sign up for the Cleanroom Safety class on iLab (Learn more about iLab and how to sign up.) The class is usually offered twice a month with emails sent out a week prior to class. The class is run on two separate days: day 1 is a two-hour presentation of basic safety concepts, practices and rules; day 2 is the safety test, which requires a grade of at least 80% before any orientation and wet-bench training. To sign up:
    1. Go to the NanoFab page on iLab. If you are not logged in, log in using the button on the top right side of the window.
    2. Select the “Request Services” tab at the top of the page.
    3. Open the “Cleanroom Orientation” section and click on the “request service” button next to “Cleanroom Safety Class (Cleanroom Orientation).
    4. Fill out the request form and click “submit request to core” at the bottom.
  3. After passing the safety class, you must complete the Wet Bench training module before signing up for any tool training. Follow the instructions above, but select the “request service” button next to “Cleanroom Wet Bench Training.”

Additional training

You may sign up for training on three tools concurrently on iLab. Tool training is offered on a first-come, first-served basis. Please know that some tools take considerable time to operate proficiently.

Once you request training on iLab, obtain a cleanroom notebook by submitting a request in iLab. Be sure to check that it has cleanroom paper.

  1. Go to the NanoFab page on iLab. If you are not logged in, log in using the button on the top right side of the window.
  2. Select the “Request Services” tab at the top of the page.
  3. Open the “Service” section and click on the “request service” button to the right.

If you are designing a mask for one of the lithography tools, you will need to be proficient in a CAD program prior to starting the circuit design. The program must be able to output files in .dxf or .gds format. If you need to make your own masks, you must follow additional steps. For more information, contact Kevin Nordquist.

Note: If you are 15 minutes late or more, you must reschedule your training and your account will be billed.

The sequence for training is generally as follows:

  1. NanoFab Cleanroom Safety
  2. NanoFab Wet Bench and Cleanroom Orientation
  3. Metrology Suite (Woollam VASE, Filmetrics F-20 and F-40, DekTak profilometer, AlphaStep profilometer, Zygo optical profilometer, Veeco 4-point probe)
  4. Resist Spinner (SCS or CEE #1 or #2)
  5. Lithography
  6. Dry Etching
  7. Metal Deposition

The specific tools are determined by the particular process you are running. This sequence is generic, but a good general guideline. There are a range of additional process tools in the cleanroom, which may require additional training programs.

Schedule equipment use

Equipment use is scheduled through iLab.

Learn more about iLab and how to sign up.

Once you have an account, you can schedule equipment through NanoFab iLab.

  1. Complete the required safety and orientation trainings listed above.
  2. Go to the Schedules tab on the NanoFab iLab site. You will see a list of all equipment that requires scheduling, organized into menus based on technique.
  3. Click on the “View Schedule” button next to the equipment you wish to schedule.
  4. On the calendar that appears, click and drag on the desired day and time to schedule time.

Note: The following techniques require staff assistance at the specified hourly staff rate:

  • DRIE (ASE)
  • Diffusion
  • Boron dope
  • Oxidation
  • High temperature anneal
  • Silicon nitride
  • Phosphorus doping
  • Polysilicon

NanoFab-provided chemicals

The following chemicals are provided by the NanoFab facility:

For chemicals not on this list, please consult the NanoFab Safety Handbook, Section II, Subsection D and E for policy and procedure details on purchasing chemicals for use in the NanoFab.

Safety

Emergency numbers

  • Emergency: 911
  • Minor spills or leaks: 480-965-1832
  • Police: 480-965-3456

Safety documents

Hazardous materials

Safety procedures

Safety links

Still have questions?

Get in touch with our team — we are happy to help you!

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