Description

This high temperature cure oven is used to cure Polyimide or ILD films on substrates. It uses a nitrogen (N2) purge to create an inert atmosphere during the cure. It has a class 100 HEPA filter installed to keep particulates low.

Specifications:

Chamber size: 25.5” W x 26” D x 37” H

Capacity: 14 cubic feet

Max Load Capacity: 400 lbs

Volts: 208

Amps: 50.5

Phase: 3

Hertz: 50/60

Heater: 16 KW

Max Temp: 350 C

Temp Uniformity +/- 3.5 C

Model No. LCD2-14NV-3

For a typical recipe, specify the time needed to ramp up to temperature and how much inert gas needs to be induced to ensure a stable atmosphere and temperature in the oven, the soak time, the length of time for the cure and the length of time for the cure.