Description
The Olympus MHL110 Microscope is for inspection of wafers, flat panel displays, and other large samples. The MHL110 has x, y moving stage for the substrates and it is suitable up to Gen-II (370 x 470 mm) size. The tool has five different objective lenses for 2.5x, 10x, 20x, 50x, and 100x which can be selected by motorized nosepiece. It supports minimum 2.5x to maximum 1000x magnification.
Techniques
- Microscopy
Documents and manuals
Rates
| Service or material | ASU rate | Nonprofit or academic rate | Notes |
|---|---|---|---|
| Equipment use | $36/hour | $50/hour |
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