Techniques - Surface and Defect Imaging

The center has several tools to image surfaces in addition to the electron microscopy techniques. Scanning-probe instruments use a small tip to determine surface topography and other information on the nanometer lateral scale for very flat surfaces. Stylus profilometry scans a multi-micron-size diamond tip across a surface to measure topography. Optical profilometry uses white-light interferometry to generate a 3D picture of a surface in a few seconds.