Profilometer - Optical (ZeScope)

Description

Optical profilometry uses white light interferometry to generate a 3D image of the sample surface with a height resolution better than 1Å.

Uses

  • Film thickness from an edge
  • Transparent film thickness in the 1 to 50 μm range with no edge/step
  • Volume of etch pits / hole
  • Roughness
  • Radius of curvature

Useful gauges

  • Non-contact
  • 8" square area (typically only measure ~ 1x1" at the very most)
  • 9 computer-controlled magnifications using 3 objectives (5x, 20x, 50x)
  • Maximum vertical range ~7 mm using 5X
  • Maximum sample height: 180 mm
  • Full 3D map
  • Lateral resolution up to ~0.3 μm

Contact

Emmanuel Soignard
Operations Director
Emmanuel.Soignard@asu.edu
480.965.7242

Techniques
  • Surface imaging
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Cost for ASU Internal Cost for ASU Internal with Staff Assistance Cost for Other Academic/Non-Profit Cost for Other Academic/Non-Profit with Staff Assistance
$27/h
$66/h
$60/h
$148/h
Videos