The electron microprobe is a powerful scanning electron microscope with energy- and wavelength dispersive elemental analysis capabilities at the micrometer scale.
Surface composition analysis via quantitative Wavelength Dispersive Spectrometry (WDS) and semi-quantitative Energy Dispersive Spectrometry (EDS), high-resolution imaging of secondary electrons (SE), back-scattered electrons (BSE), cathodoluminescence (CL), and X-rays