ASU NanoFab is a flexible nanoscale processing and fabrication facility at Arizona State University, offering state-of-the-art device processing and characterization tools for university research and external company prototype development. 

Our core strengths are nanofabrication, unique silicon processing, molecular- and bioelectronics, microelectromechanical systems (MEMS), nano-fluidics, optoelectronics and device characterization. The expertise of our skilled staff, several of whom have more than 25 years of experience, is also available to users.

Whatever the requirements — from single molecule fabrication to entire systems on a chip and beyond — ASU NanoFab can enable and enhance your research and development needs. NanoFab utilizes an advisory committee for both operational and strategic advice. Organized in 1981, this facility is one of sixteen sites affiliated with the National Nanotechnology Coordinated Infrastructure (NNCI) as the Southwest node. Learn more about the NanoFab’s affiliation with NCI-SW.

Today, NanoFab’s 3,800 square-foot class 100 cleanroom and eight auxiliary labs provide resources and infrastructure supporting research and education of numerous faculty members, post-doctoral researchers and students drawn from various disciplines, including electrical engineering, chemical engineering, bioengineering, materials science, mechanical engineering, physics, chemistry and industrial engineering. The microelectronics research is focused in five main cross-disciplinary efforts: bio- and molecular- electronics, low power electronics, materials and process fundamentals, molecular beam epitaxy and optoelectronics and nanostructures and quantum structures.

Other research activities include wide band gap semiconductors, high-k dielectrics and nanomagnetics.