Plasma Processing Techniques
This talk will review the various plasma processing techniques that exist within the NanoFab. These techniques include Reactive Ion Etch, Inductively Coupled Plasma Etch, Deep Silicon Etch, Plasma Sputtering and Plasma Enhanced Chemical Vapor Deposition. The discussion will also include an introductory look into plasma discharge concepts, discharge configurations and tool design considerations.
TEC Talks: Technology, Expertise, Collaboration. The TEC Talks seminar series, presented by ASU Core Facilities, focuses on cutting edge technology and its practical application. The objective is to drive innovation in discovery, from project conception and funding through data analysis and publication. The goal is achieved by addressing scientific problems with customized solutions and fostering collaborations between researchers and core facility scientists.
Thin Film Deposition Techniques
In order to fabricate nanoscale devices in the ASU NanoFab, a lithography technique is required to resolve patters at nanometer dimension. The JEOL 6000 FS/E Electron Beam Lithography system is a tool used to define patters as small as 20 nm by scanning a focused beam of electrons in a patterned fashion across a surface in order to create very small structures, such as integrated circuits or other nanostructures.
TEC Talks: Technology, Expertise, Collaboration. The TEC Talks seminar series, presented by ASU Core Facilities, focuses on cutting edge technology and its practical application. The objective is to drive innovation in discovery, from project conception and funding through data analysis and publication. The goal is achieved by addressing scientific problems with customized solutions and fostering collaborations between researchers and core facility scientists.
Thin Film Deposition Capabilities
This talk will review Thin Film deposition capabilities by reviewing the various techniques and tools available to perform these processes in the NanoFab. These capabilities will range from sputtering, plasma enhance chemical vapor deposition, electron-beam, and atomic layer deposition of metallic and dielectric films. Specific examples of depositing optical coatings will be given by Jaime Quintero. In addition, the process development and testing of superconductor films will be described by Farzad Faramarzi.
TEC Talks: Technology, Expertise, Collaboration. The TEC Talks seminar series, presented by ASU Core Facilities, focuses on cutting edge technology and its practical application. The objective is to drive innovation in discovery, from project conception and funding through data analysis and publication. The goal is achieved by addressing scientific problems with customized solutions and fostering collaborations between researchers and core facility scientists.