Rates
AS-One 100 RTP
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment Use | $52.5/hour | Contact NanoFab |
AS-One 150 RTP
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use |
$52.5/ hour |
Contact NanoFab |
Cambridge Savannah ALD Deposition Tool
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
CEE Spin Coater #1 and #2
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
CHA E-Beam Evaporator
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Edwards2 Thermal Evaporator
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Elionix ELS-BODEN 100keV Electron Beam Lithography
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $63/ Hour | Contact NanoFab |
EVG 620 Aligner
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
|
Filmetrics F20 and F40
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Heidelberg MLA-150
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Hitachi S-4700 Field Emission Scanning Electron Microscope
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $42/ Hour | Contact NanoFab |
Lesker #1 Sputter Deposition Tool
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Lesker #2 Sputter Deposition Tool
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Lesker #3 E-Beam Evaporator
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Lesker #4 E-Beam Evaporator
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5 per Hour | Contact NanoFab |
Lesker #5 Sputter Deposition Tool
| Service | ASU rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
OAI 808 Aligner
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact ASU |
Oxford PECVD
| Service | ASU rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
PlasmaLab M80 Plus – Chlorine
| Service | ASU Internal Rate | External Organizations | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
PlasmaLab M80 Plus – Fluorine
| Service | ASU Internal Rate | External Organizations | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
PlasmaTherm 790 RIE – Fluorine
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
PlasmaTherm Apex ICP
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.50 / Hour | Contact NanoFab | Upto 450 watt hours |
SCS Spin Coater
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
STS AGE ICP - Chlorine
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
STS ASE ICP DRIE – Fluorine
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Tegal 421
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Xactix XeF2 Si Etcher
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Zygo ZeGage
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |