GCA 8500 5X Stepper

Description

The GCA 8500 5X stepper is a lithography tool for printing resolution down to 0.8um and pattern placement accuracy of ±0.25um globally and ±0.15um with local alignment. It has been modified from the original production design to handle various size and thicknesses of substrates.

Specs:
Wavelength: 365 nm monochromatic
Lens: Tropel 2235 5X, 22 mm diameter, 0.35 NA
DOF: 1.49 um
Resolution: 0.83 um L/S
Registration accuracy: +- 0.25 um (global), +- 0.15 um (Local)
Illumination uniformity: <3.0%
Maximum die size: 15 x 15 mm (Die must fit within the 22 mm diameter lens limit)
Mask: 5” x 5” x 0.90” Cr on quartz or soda lime
Substrate chucks:

  • Two piece part chucks – Minimum sample size 10 x 10 mm
  • 100 mm wafer chuck
  • 50 mm wafer chuck
  • Pedestal inserts allow substrate thicknesses of 200 to 800 um

Learn more about lithography deposition technique and associated tools.

Techniques
  • Lithography
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
We welcome industry customers! Contact us to find out our current rates.
Photos
GCA 8500 5X Stepper