OAI 808 Aligner

Description

The OAI Model 800 Mask Aligner is a semi-automated, four-camera, optical front and backside mask Aligner. It delivers ultra-precise (1µm-2µm) alignment accuracy. This mask Aligner also features motorized backside focus, motorized auto leveling and auto gap setting.

Specs:
Size: 2", 100mm, 150mm, 200mm, Pieces
Thickness: 0.1 - 10mm
Mask Size: 4"x4"; 5”x5”, 7”x7”, and 9”x9”

Alignment accuracy:

  • Top side alignment: ± 1.0µm 3σ
  • Bottom side alignment: ± 1.25µm 3σ
  • Large gap alignment: Option / ± 1.5µm 3σ

Resolution:

  •  Vacuum + Hard Contact ≤ 1 µm
  •  Hard Contact ≤ 1.5 µm
  • Soft Contact ≤ 2.0 µm
  • Proximity ≥ 3.0 µm

Exposure:

  • Wave length: 350 - 450nm
  • Mercury arc lamp: 350 W

Learn more about lithography deposition technique and associated tools.

Techniques
  • Lithography
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact ASU  
We welcome industry customers! Contact us to find out our current rates.
Photos
OAI 808 aligner