Description
The Specialty Coating Systems Spin Coater Series is a programmable coater for the uniform application of photoresists, polyimides, silica films and most organic solutions to planar substrates. Chucks are available for small pieces up to 6” wafers.
Learn more about lithography deposition technique and associated tools.
Techniques
- Lithography
Documents and manuals
- FileSCS Spinner SOP Rev B.pdf355.43 KB
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Photos
