SCS Spin Coater


The Specialty Coating Systems Spin Coater Series is a programmable coater for the uniform application of photoresists, polyimides, silica films and most organic solutions to planar substrates. Chucks are available for small pieces up to 6” wafers.

Learn more about lithography deposition technique and associated tools.

  • Lithography
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
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SCS Spin Coater