The STS ASE ICP DRIE – Fluorine is a load locked, inductively coupled plasma etch system. Process gases are SF6, C4F8, O2 and Ar. The system is for deep silicon etching using the Bosch process. Masks allowed in this system are photoresist and SiO2.
This tool requires pre-requisite training on other techniques: Super User AND PlasmaLab M80 Plus – Fluorine OR Super User AND PlasmaLab M80 Plus – Chlorine OR Super User AND PlasmaTherm 790 RIE – Fluorine.
Wafer Size: 100 mm wafers. Wafers smaller than 100 mm and irregularly shaped samples must be placed on a 100 mm carrier. Platen Size: 100 mm.
ICP Power Range: 0 – 900 Watts
Bias Power Range: 0 – 30 Watts
MFC Flow Range:
SF6: 0 – 300 sccm
C4F8: 0 – 200 sccm
O2: 0 – 100 sccm
Ar: 0 – 100 sccm.
Pressure Range: < 90 mTorr
Backside Cooling: Helium. Clamped.
Selectivity to Photoresist: 50:1.
Selectivity to Wet Thermal SiO2: 100:1.
Typical Repeatable Aspect Ratio: 10:1.
- Dry etch, Inductively coupled plasma etching