Zygo ZeGage


The Zygo ZeGage is a 3D optical surface profiler. It provides non-contact measurement and characterization of surface features. Samples measured must be both reflective and opaque.

This tool requires pre-requisite training on other techniques: clean room safety and wet bench training.

NA: 0.14
Working Distance: 21 mm
Optical Resolution: 2.04 μm
Field of View: 1.74 mm x 1.74 mm. Capable of field stitching.
Spatial Sampling: 1.74 μm/pixel

Learn more about characterization deposition technique and associated tools, such as 3D optical profiling.

  • Characterization, 3D optical profiling
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
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