The Zygo ZeGage is a 3D optical surface profiler. It provides non-contact measurement and characterization of surface features. Samples measured must be both reflective and opaque.
This tool requires pre-requisite training on other techniques: clean room safety and wet bench training.
Working Distance: 21 mm
Optical Resolution: 2.04 μm
Field of View: 1.74 mm x 1.74 mm. Capable of field stitching.
Spatial Sampling: 1.74 μm/pixel
- Characterization, 3D optical profiling
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