Description
Optical profilometry uses white light interferometry to generate a 3D image of the sample surface with a height resolution better than 1Å.
Uses
- Film thickness from an edge
- Transparent film thickness in the 1 to 50 μm range with no edge/step
- Volume of etch pits / hole
- Roughness
- Radius of curvature
Useful gauges
- Non-contact
- 8" square area (typically only measure ~ 1x1" at the very most)
- 9 computer-controlled magnifications using 3 objectives (5x, 20x, 50x)
- Maximum vertical range ~7 mm using 5X
- Maximum sample height: 180 mm
- Full 3D map
- Lateral resolution up to ~0.3 μm
Contact
Emmanuel Soignard
Operations Director
Emmanuel.Soignard@asu.edu
480.965.7242
Techniques
- Surface imaging
Documents and manuals
- File
ASU Unit
Knowledge Enterprise
