SEM Prisma E SEM

Description

Specifications

  • Thermal emission SEM with tetrode dual-anode source emission geometry
  • accelerating voltage: 200V to 30kV
  • beam current up to 2µA continuously adjustable
  • Magnification 5 to 1,000,000x
  • high vacuum imaging (< 6.10-4 Pa)
    • 3.0nm at 30kV (SE)
    • 8.0 nm at 3kV(SE)
  • low-vacuum imaging (up to 130Pa)
    • 3.0nm at 30kV (SE)
    • 10nm at 3 kV (SE)
  • ESEM (up to 2600Pa)
    • 3 nm at 30kV (SE)

Detectors

  • Secondary electron
  • Back Scattered Electron
  • Energy dispersive X-ray detector

Contact

Sisouk Phrasavath
Engineer Principal
sisouk.phrasavath@asu.edu
480.965.9153

Techniques
  • SEM
  • ESEM
  • EDS
ASU Unit
Knowledge Enterprise
Rates
Cost for ASU Internal Cost for ASU Internal with Staff Assistance Cost for Other Academic/Non-Profit Cost for Other Academic/Non-Profit with Staff Assistance
$42.80/h
$83.80/h
$97.40/h
$189.40/h