XRT is a non-destructive diffraction method used to map lattice defects and strain in single crystals on the millimeter to micrometer scale.
- Map defects in wafers
- Can only be used is very low defect density materials (< 10^5 /cm²)
- Laue provides single crystal sample orientation
- Can map sample with different grain orientations (72.5 μm resolution 1"Ø)
- Live x-ray imaging
- Samples up to 100mm diameter (6" and 8" require multiple exposures but are typically possible)
- Transmission topography
- Reflection topography
- 25 or 50 μm resolution with image plate
- Can measure any single crystal wafer
- CuKα tube
- MoKα tube
- Wide range of slits
- Live X-ray camera
- Image plates and image plate reader
- Large area Dexela detector with 75um resolution.
Radiation safety training is required prior to requesting training on the instrument via ilab. Once your radiation safety training is complete, bring your dosimeter badge, which is required to operate the instrument.
- X-ray diffraction
- File1.7 MB
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