Description
The Savannah ALD tool is used to deposit thin layers of aluminum oxide (Al2O3), titanium oxide (O2Ti) and hafnium oxide (HfO2).
Learn more about thin film deposition technique and associated tools.
Techniques
- Thin film deposition
Documents and manuals
- File
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU Internal Rate | External Organizations | Notes |
|---|---|---|---|
| Equipment use | $50 per Hour | Contact NanoFab |
Photos
