Cambridge Savannah ALD Deposition Tool

Description

The Savannah ALD tool is used to deposit thin layers of aluminum oxide, titanium oxide and hafnium oxide.

Learn more about thin film deposition technique and associated tools.

Techniques
  • Thin film deposition
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
We welcome industry customers! Contact us to find out our current rates.
Photos
Cambridge Savannah ALD Deposition Tool