Description
The CEE Spin Coaters #1 and #2 are photoresist spinners. Spin Coater #1 has a programmable Precision Hot Plate Bake. Spin Coater #2 is stand-alone spinner. The Brewer Science CEE 200CBX precision coat-bake system combines a track-quality precision spin coater with a high-uniformity bake plate. CEE 200CBX programs are easily entered, monitored and stored through a Windows®-based PC graphical user interface (GUI). These spin coaters apply coatings to substrates up to 200mm round or 7 in. square and spin at speeds up to 6000 rpm. All coatings are hand dispensed using pipettes.
Learn more about lithography deposition technique and associated tools.
Techniques
- Lithography
Documents and manuals
- FileCee-Coater-SOP-Rev-B.pdf1.2 MB
ASU Unit
Knowledge Enterprise
Rates
Service | ASU Internal Rate | External Organization Rate | Notes |
---|---|---|---|
Equipment use | $52.5/ Hour | Contact NanoFab |
Photos