CEE Spin Coater #1 and #2

Description

The CEE Spin Coater #1 and #2 are two photoresist Spinners, one with a programmable Precision Hot Plate Bake (#1) and the other is stand-alone spinner (#2). The Brewer Science CEE 200CBX precision coat-bake system combines a track-quality precision spin coater with a high-uniformity bake plate. CEE 200CBX programs are easily entered, monitored and stored through a Windows®-based PC graphical user interface. For applying coatings to substrates up to 200mm round or 7 in. square and spin speeds up to 6000 rpm. All coatings are hand dispensed using pipettes.

Learn more about lithography deposition technique and associated tools.

Techniques
  • Lithography
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
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Photos
CEE Spin Coater #1 and #2