CEE Spin Coater #1 and #2

Description

The CEE Spin Coaters #1 and #2 are photoresist spinners. Spin Coater #1 has a programmable Precision Hot Plate Bake. Spin Coater #2 is stand-alone spinner. The Brewer Science CEE 200CBX precision coat-bake system combines a track-quality precision spin coater with a high-uniformity bake plate. CEE 200CBX programs are easily entered, monitored and stored through a Windows®-based PC graphical user interface (GUI). These spin coaters apply coatings to substrates up to 200mm round or 7 in. square and spin at speeds up to 6000 rpm. All coatings are hand dispensed using pipettes.

Learn more about lithography deposition technique and associated tools.

Techniques
  • Lithography
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organization Rate Notes
Equipment use $52.5/ Hour Contact NanoFab