CHA E-Beam Evaporator


The CHA tool is an electron beam evaporation system utilizes a four pocket hearth for multi-layer film deposition. The tool is used to deposit aluminum, nickel, platinum, and titanium using a triple dome planetary.

Learn more about thin film deposition technique and associated tools.

  • Thin film deposition
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
We welcome industry customers! Contact us to find out our current rates.
CHA E-Beam Evaporator