CHA E-Beam Evaporator

Description

The CHA tool is an electron beam evaporation system utilizing a four pocket hearth for multi-layer film deposition. The tool is used to deposit aluminum (Al), nickel (Ni), platinum (Pt), and titanium (Ti) using a triple dome planetary.

Learn more about thin film deposition technique and associated tools.

Techniques
  • Thin film deposition
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  
Photos
CHA E-Beam Evaporator