Description
The CHA tool is an electron beam evaporation system utilizing a four pocket hearth for multi-layer film deposition. The tool is used to deposit aluminum (Al), nickel (Ni), platinum (Pt), and titanium (Ti) using a triple dome planetary.
Learn more about thin film deposition technique and associated tools.
Techniques
- Thin film deposition
Documents and manuals
- FileCHA SOP Rev J.pdf1.9 MB
ASU Unit
Knowledge Enterprise
Rates
| Service | ASU Internal Rate | External Organization Rate | Notes |
|---|---|---|---|
| Equipment use | $52.5/ Hour | Contact NanoFab |
Photos
