Description
The Lesker #2 tool is a dedicated zinc oxide (ZnO) sputter deposition tool. The tool has single ZnO target powered by an RF power supply.
Learn more about thin film deposition technique and associated tools.
Techniques
- Thin film deposition
Documents and manuals
- FileZnOLeskerSputterSOP02-2009.pdf190.06 KB
ASU Unit
Knowledge Enterprise
Rates
Service | ASU Internal Rate | External Organization Rate | Notes |
---|---|---|---|
Equipment use | $52.5/ Hour | Contact NanoFab |
Photos