Lesker #2 Sputter Deposition Tool

Description

The Lesker #2 tool is a dedicated zinc oxide (ZnO) sputter deposition tool. The tool has single ZnO target powered by an RF power supply.

Learn more about thin film deposition technique and associated tools.

Techniques
  • Thin film deposition
Documents and manuals
ASU Unit
Knowledge Enterprise
Rates
Service ASU Internal Rate External Organizations Notes
Equipment use $50 per Hour Contact NanoFab  
Photos
Lesker #2 Sputter Deposition Tool