The Lesker #3 tool is an electron beam evaporation system utilizing a four pocket hearth. The tool has a 12” platen to load up to five 4” substrates. The evaporator has the ability to evaporate Ag, Al, Au Cr, Cu, Ge, Mo, Ni, NiCr, Pd, Pt, Si, Ti, V, Vi and W materials. The evaporator has the ability to deposit dielectrics such as AL2O3 and SiO2. This evaporator has restrictions for Zn and ZnO materials.
- Thin film deposition
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