Lesker #4 E-Beam Evaporator


The Lesker #4 tool is an electron beam evaporation system utilizing a four pocket hearth.  The tool has a 12” platen to load up to five 4” substrates. The evaporator currently has the ability to evaporate Al, Al/Si, Cr, Mo, Ni, Pd, Pt, Si and Ti metal materials. It also has the ability to deposit dielectrics films such as AL2O3 and SiO2. This evaporator has restrictions for Au, Ag, Cu, Zn and ZnO materials.

Learn more about thin film deposition technique and associated tools.

  • Thin film deposition
Documents and manuals
ASU Unit
Knowledge Enterprise
Service ASU Internal Rate External Organizations Notes
Equipment use $46.35 per Hour Contact NanoFab  
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Lesker #4