The Lesker #4 tool is an electron beam evaporation system utilizing a four pocket hearth. The tool has a 12” platen to load up to five 4” substrates. The evaporator currently has the ability to evaporate Al, Al/Si, Cr, Mo, Ni, Pd, Pt, Si and Ti metal materials. It also has the ability to deposit dielectrics films such as AL2O3 and SiO2. This evaporator has restrictions for Au, Ag, Cu, Zn and ZnO materials.
- Thin film deposition
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|Equipment use||$46.35 per Hour||Contact NanoFab|